PHOTOACOUSTIC SYSTEM AND ASSOCIATED METHOD
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United States of America Patent
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Issued Date -
May 30, 2024
app pub date -
Nov 28, 2023
filing date -
Nov 29, 2022
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Abstract
A photoacoustic system includes a semiconductor substrate including a hollow volume and a window extending in vertical alignment with a part of the hollow volume, and a surface emitting device including a waveguide and a diffraction grating, the waveguide having an upper face and a lower face, the lower face being disposed on the window, the diffraction grating being disposed on the upper face or on the lower face.
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