HIGH ELECTRON MOBILITY TRANSISTOR AND FABRICATION METHOD THEREOF

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United States of America Patent

APP PUB NO 20240178285A1
SERIAL NO

18097286

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Abstract

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A high electron mobility transistor includes a semiconductor channel layer and a semiconductor barrier layer disposed on a substrate. A source electrode, a gate electrode and a drain electrode are disposed on the semiconductor channel layer. A patterned dielectric layer is disposed on the semiconductor barrier layer, and between the gate electrode and the drain electrode. A first field plate is extended continuously from a side of the patterned dielectric layer to the top surface thereof, and has a step in height. A first dielectric layer is disposed between the semiconductor barrier layer and the patterned dielectric layer. A second dielectric layer covers the patterned dielectric layer. The dielectric constant of the patterned dielectric layer is higher than that of the first dielectric layer and the second dielectric layer.

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Patent Owner(s)

Patent OwnerAddress
VANGUARD INTERNATIONAL SEMICONDUCTOR CORPORATION123 PARK AVE-3RD HSINCHU SCIENCE PARK HSINCHU

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Cheng, Wei-Chih Tainan City, TW 12 15
Lien, Yi-Wei Hsinchu City, TW 7 16
Shen, Shyh-Chiang Taipei City, TW 14 158
Tsai, Hsin-Chang Kaohsiung City, TW 48 325

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