PLACEMENT BOARD AND PLACEMENT STRUCTURE
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United States of America Patent
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Issued Date -
May 30, 2024
app pub date -
Feb 4, 2022
filing date -
Mar 30, 2021
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Abstract
A placement board includes: a main body unit configured to form a flow channel for circulation of a medium for heat exchange and place a workpiece thereon, the main body unit being made of a metallic material; and a heater provided in an outer edge region of the main body unit. A temperature difference between the outer edge region and an inner region of the main body unit at a surface of the main body unit where the workpiece is placed is 20° C. or more in a state where the medium has been caused to circulate through the flow channel.
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