CARRIER CHUCK AND METHODS OF FORMING AND USING THEREOF
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United States of America Patent
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Issued Date -
May 30, 2024
app pub date -
Nov 30, 2022
filing date -
Nov 30, 2022
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Abstract
The present disclosure is directed to a carrier chuck having a base plate with a top surface, a plurality of first magnets positioned in a first region of the top surface, the plurality of first magnets configured to produce a first electromagnetic field to retain or suspend a panel placed on the carrier chuck during panel processing, wherein the first region corresponds to a region of the panel which comprises a magnetic material.
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