OPTICAL ELEMENT, PROJECTION OPTICAL UNIT AND PROJECTION EXPOSURE APPARATUS
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United States of America Patent
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Issued Date -
May 30, 2024
app pub date -
Feb 8, 2024
filing date -
Aug 13, 2021
priority date (Note) -
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Abstract
An optical element for a projection exposure apparatus comprises a mirror body having an optically active surface. The mirror body comprises a base portion which carries a sensor system. The mirror body comprises an edge portion on which actuator connectors for connecting actuators to the optical element are provided. The base portion has greater stiffness than the edge portion. A stiffening rib structure is attached to the back side of the edge portion, which faces away from the optically active surface. The rib structure supports the edge portion on the base portion.
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