MEMS DEVICE
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United States of America Patent
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Issued Date -
May 30, 2024
app pub date -
Feb 2, 2024
filing date -
Aug 30, 2021
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Abstract
An inertial sensor includes a MEMS substrate and an upper lid joined to the MEMS substrate. The MEMS substrate includes a capacitance portion including first and second movable electrodes causing a capacitance to change in accordance with a distance between the first and second movable electrodes, a holding portion holding the capacitance portion, and a spring portion connecting the capacitance portion and the holding portion to each other and supporting the first movable electrode and the second movable electrode in a displaceable manner with respect to the holding portion.
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