Piezoelectric Element And Piezoelectric Actuator
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United States of America Patent
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Issued Date -
May 30, 2024
app pub date -
Nov 22, 2023
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Nov 24, 2022
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Abstract
A piezoelectric element includes a substrate, a first electrode, a thin-film piezoelectric body containing potassium, sodium, and niobium, and a second electrode. When the thin-film piezoelectric body is divided into two equal parts in a film formation direction, a first electrode side is defined as a first region, and a second electrode side is defined as a second region, a value A obtained by dividing a total value of an XRD peak intensity of a (111) plane and an XRD peak intensity of a (011) plane in the first region by a total value of an XRD peak intensity of a (100) plane, the XRD peak intensity of the (111) plane, and the XRD peak intensity of the (011) plane is smaller than a value B obtained by dividing a total value of an XRD peak intensity of a (111) plane and an XRD peak intensity of a (011) plane in the thin-film piezoelectric body by a total value of an XRD peak intensity of a (100) plane, the XRD peak intensity of the (111) plane, and the XRD peak intensity of the (011) plane.
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