OPTICAL WAVEGUIDE PRODUCTION METHOD AND OPTICAL WAVEGUIDE
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United States of America Patent
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Issued Date -
May 23, 2024
app pub date -
May 27, 2022
filing date -
May 31, 2021
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Abstract
An optical waveguide manufacturing method according to one embodiment is an optical waveguide manufacturing method by irradiating glass with femtosecond laser beam to form an optical waveguide. The optical waveguide manufacturing method includes a first process of irradiating the glass with the femtosecond laser beam having a pulse width of 300 (fs) or less and a repetition frequency of 700 (kHz) or less while relatively moving the glass and a focal position of the femtosecond laser beam and a second process of irradiating an increased refractive index portion with a femtosecond laser beam having a pulse width of 300 (fs) or less and a repetition frequency higher than 700 (kHz).
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