Nano-Mechanical Infrared Spectroscopy System and Method Using Gated Peak Force IR
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Issued Date -
May 23, 2024
app pub date -
Nov 20, 2023
filing date -
Nov 21, 2022
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Abstract
An apparatus and method of performing sample characterization with an AFM and a pulsed IR laser directed at the tip of a probe of the AFM. Gated laser pulsing and gated detection based on a lock-in amplifier, boxcar integrator or FFT may be employed in Peak force tapping operation. Nano-spectroscopic measurements with sub-20 nm, and even sub-10 nm resolution can be executed together with nano-mechanical and other property measurements.
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