Scanning Probe Microscope, Sample Observation Processing System, and Electric Characteristic Evaluation Device
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United States of America Patent
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Issued Date -
May 23, 2024
app pub date -
Mar 26, 2021
filing date -
Mar 26, 2021
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Abstract
A scanning probe microscope is designed to improve visibility of a marker in broad and high-speed observation by a magnifying observation processing device. A marker is disposed so that an aspect ratio of an observation visual field of the magnifying observation processing device is matched with an observation angle in a circumference centering on a region of interest. Further, the marker is formed by scratch scars of multiple lines, for example, to enhance edge contrast.
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