VACUUM PUMP, VACUUM PUMP CONTROLLER, AND REMOTE CONTROLLER
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United States of America Patent
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Issued Date -
May 23, 2024
app pub date -
Mar 11, 2022
filing date -
Mar 19, 2021
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Abstract
A vacuum pump, a vacuum pump controller, and a remote controller are provided that can reduce the workload of users and field service engineers. A vacuum pump 10 includes a turbomolecular pump 100 that exhausts gas inside a semiconductor manufacturing apparatus X, and a controller 200 that performs control on the turbomolecular pump 100. The controller 200 includes a remote signal receiving means that receives a command signal from a remote controller 300, which remotely controls the turbomolecular pump 100, and changes a setting relating to an operating specification of the turbomolecular pump 100 on the basis of the command signal received by the remote signal receiving means.
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