INDIUM PRECURSOR COMPOUND, METHOD OF PREPARING THIN FILM USING THE SAME, AND BOARD PREPARED USING THE SAME
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United States of America Patent
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Issued Date -
May 23, 2024
app pub date -
Oct 28, 2020
filing date -
Oct 30, 2019
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Abstract
The present invention relates to an indium precursor compound, a method of preparing a thin film using the same, and a board prepared using the same. More particularly, the present invention relates to an indium precursor compound represented by Chemical Formula 1, a method of preparing a thin film using the same, and a board prepared using the same.
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