METHOD AND DEVICE FOR ASCERTAINING DYNAMIC PARAMETERS OF A MEMS APPARATUS, AND MEMS APPARATUS
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United States of America Patent
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Issued Date -
May 23, 2024
app pub date -
Oct 5, 2022
filing date -
Nov 2, 2021
priority date (Note) -
Published
status (Latency Note)
Importance
Abstract
A method for ascertaining at least one dynamic parameter of a MEMS apparatus, which has at least one movable component, and the at least one dynamic parameter describes a dynamic property of the at least one movable component. A test signal which has at least one static excitation of constant amplitude is applied to the MEMS apparatus, and a response signal of the MEMS apparatus to the test signal is detected. At least one static parameter of the MEMS apparatus is ascertained by evaluating the response signal in respect of the at least one static excitation, using a model of at least the movable component of the MEMS apparatus, the at least one static parameter describing a geometric and/or structural property of the at least one movable component. The at least one dynamic parameter of the MEMS apparatus is calculated based on the ascertained at least one static parameter.
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