VACUUM SUCTION HEAD AND APPARATUS FOR TRANSFERRING SEMICONDUCTOR PRODUCT USING THE SAME
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United States of America Patent
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Issued Date -
May 23, 2024
app pub date -
Jul 24, 2023
filing date -
Nov 23, 2022
priority date (Note) -
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Abstract
A vacuum suction head may include a holder including a through hole formed therein, a suction pad surrounding at least a portion of a side surface of the holder, and a packing pad on a lower surface of the holder. The suction pad may protrude below a lower surface of the holder. The packing pad may include a cutout part. The cutout part may allow a space between the suction pad and the packing pad such that the space and the through hole may be in fluid communication with each other.
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