SUBSTRATE SUPPORT AND SUBSTRATE PROCESSING DEVICE
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United States of America Patent
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Issued Date -
May 16, 2024
app pub date -
Jan 26, 2024
filing date -
Jul 28, 2021
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Abstract
The present disclosure provides a substrate support. The substrate support comprises: a base; a first dielectric portion, disposed on the base, having a substrate support portion on which a substrate is mounted; and a second dielectric portion, disposed around the first dielectric portion, having an edge ring support portion on which an edge ring is mounted, wherein at least one of the first dielectric portion and the second dielectric portion includes a sprayed layer formed of an insulating material.
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