FLOW RATE CONTROL DEVICE
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United States of America Patent
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Issued Date -
May 16, 2024
app pub date -
Jan 22, 2024
filing date -
Apr 25, 2019
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Abstract
The flow rate control device 10 includes a control valve 11, a restriction part 12 provided downstream of the control valve 11, an upstream pressure sensor 13 for measuring a pressure P1 between the control valve 11 and the restriction part 12, a differential pressure sensor 20 for measuring a differential pressure ΔP between the upstream and the downstream of the restriction part 12, and an arithmetic control circuit 16 connected to the control valve 11, the upstream pressure sensor 13, and the differential pressure sensor 20.
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