CERIUM OXIDE PARTICLES, MAKING PROCESS THEREOF AND USE THEREOF IN CHEMICAL MECHANICAL POLISHING

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United States of America Patent

APP PUB NO 20240158251A1
SERIAL NO

18550272

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ATTORNEY / AGENT: (SPONSORED)

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Abstract

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The invention relates to cerium oxide particles having a roughness index RI of at least 5, to a making process thereof and to the use thereof in chemical mechanical polishing applications.

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Patent Owner(s)

Patent OwnerAddress
RHODIA OPÉRATIONSFRANCE

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Boudot, Mickaël Antony, FR 2 0
Buissette, Valérie Paris, FR 29 20
D'Alencon, Lauriane Issy-Les-Moulineaux, FR 24 14
Plissonneau, Marie Lyon, FR 5 2
Toth, Réka Saint-Genis-Laval, FR 9 2

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