SEMICONDUCTOR DEVICE AND FABRICATION METHOD THEREOF
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United States of America Patent
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Issued Date -
May 9, 2024
app pub date -
Nov 28, 2022
filing date -
Nov 7, 2022
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Abstract
A semiconductor device includes a substrate having a flash memory region and a logic device region, a logic transistor disposed in the logic device region, and a flash memory transistor disposed in the flash memory region. The flash memory transistor includes a metal select gate having two opposite sidewalls and two memory gates disposed on the two opposite sidewalls of the metal select gate.
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