TERAHERTZ WAVE DETECTION CHIP AND TERAHERTZ WAVE DETECTION SYSTEM

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United States of America Patent

APP PUB NO 20240151642A1
SERIAL NO

18087462

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Abstract

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A terahertz wave detection chip includes a substrate and at least one detection structure. The detection structure is disposed on a surface of the substrate. The detection structure includes a metamaterial layer and a hydrophilic layer, and the hydrophilic layer is disposed on the metamaterial layer.

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Patent Owner(s)

Patent OwnerAddress
INDUSTRIAL TECHNOLOGY RESEARCH INSTITUTENO 195 SEC 4 CHUNG-HSING ROAD CHUTUNG HSINCHU R O C

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
HSIEH, Cho-Fan Luodong Township, TW 16 15
LI, Yu-Tai Taichung City, TW 10 6
LIN, Kao-Chi Kaohsiung City, TW 3 0
WU, Teng-Chun Jinning Township, TW 16 73

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