SEMICONDUCTOR DEVICE INCLUDING A CONTACT PLUG
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United States of America Patent
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Issued Date -
May 2, 2024
app pub date -
Jun 6, 2023
filing date -
Oct 26, 2022
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Abstract
A semiconductor device includes a gate structure disposed on a substrate and a contact plug. The contact plug includes a first conductive pattern contacting an upper surface of the first gate structure and a second conductive pattern contacting an upper surface of the first conductive pattern. An upper surface of a central portion of the first conductive pattern is higher than an upper surface of an edge portion of the first conductive pattern. A lower surface of a central portion of the second conductive pattern is higher than a lower surface of an edge portion of the second conductive pattern.
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