Inattentive HF Concentration Vapors Phase Release of Micro-electro-mechanical Systems and Optical Systems

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United States of America Patent

APP PUB NO 20240140786A1
SERIAL NO

18496823

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Abstract

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A low-cost, conventional release using low concentrations of HF to overcome the stiction of MEMS structure.

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UNM RAINFOREST INNOVATIONS101 BROADWAY BLVD NE - SUITE 1100 ALBUQUERQUE NM 87102

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Busani, Tito Albuquerque, US 10 2
Chityala, Ravi Kiran Albuquerque, US 2 0

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