LASER PROCESSING APPARATUS
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United States of America Patent
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Issued Date -
May 2, 2024
app pub date -
Oct 25, 2023
filing date -
Oct 31, 2022
priority date (Note) -
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status (Latency Note)
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Abstract
A laser oscillation mechanism of a laser beam irradiation unit has a first mode to break growing debris, a second mode to suppress generation of molten debris, and a third mode to break the growing debris and suppress generation of the molten debris. The laser oscillation mechanism includes a selecting part that selects any of the first mode, the second mode, and the third mode. The laser oscillation mechanism sets a repetition frequency with a first group being one unit in the first mode, and sets a repetition frequency with a second group being one unit in the second mode, and sets a repetition frequency with a third group being one unit in the third mode.
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