MANUFACTURING METHOD OF DISPLAY APPARATUS AND DISPLAY APPARATUS

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United States of America Patent

APP PUB NO 20240138183A1
SERIAL NO

18373324

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ATTORNEY / AGENT: (SPONSORED)

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Abstract

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A method for manufacturing a novel display apparatus is provided. The method includes a first step of forming a first electrode, a second electrode, and a first gap over an insulating film, a second step of forming a first film over the second electrode; a third step of forming a first layer overlapping with the first electrode, a fourth step of removing the first film by an etching method to form a first unit overlapping with the first electrode, a fifth step of removing a surface of the second electrode, a sixth step of forming a second film over the first layer and the second electrode, a seventh step of forming a second layer overlapping with the second electrode, and an eighth step of removing the second film by an etching method using the second layer to form a second unit overlapping with the second electrode and a second gap.

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Patent Owner(s)

Patent OwnerAddress
SEMICONDUCTOR ENERGY LABORATORY CO LTDATSUGI

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
ADACHI, Hiroki Tochigi, JP 191 4616
GOTO, Naoto Tochigi, JP 33 193
IDOJIRI, Satoru Tochigi, JP 55 661
KAWAKAMI, Sachiko Atsugi, JP 291 3571
NAKAZAWA, Yasutaka Tochigi, JP 108 647
OHIDE, Takayuki Isehara, JP 7 11
OKAZAKI, Kenichi Atsugi, JP 400 4734
YAMAWAKI, Hayato Atsugi, JP 9 15

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