SEMICONDUCTOR DEVICES
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United States of America Patent
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Issued Date -
Apr 25, 2024
app pub date -
Apr 30, 2023
filing date -
Apr 30, 2023
priority date (Note) -
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Abstract
A semiconductor device may include an active pattern on a substrate; an isolation pattern on the substrate, the isolation pattern covering opposite sidewalls of the active pattern; a liner on the isolation pattern, a liner including a material different from the isolation pattern; a gate structure contacting an upper surface of the active pattern and an upper surface of the liner; and a plurality of channels spaced apart from each other in a vertical direction perpendicular to an upper surface of the substrate, each of the plurality of channels extending through the gate structure.
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