SEMICONDUCTOR DEVICE AND METHOD OF MANUFACTURING THE SAME
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United States of America Patent
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Issued Date -
Apr 18, 2024
app pub date -
Oct 2, 2023
filing date -
Oct 17, 2022
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Abstract
A semiconductor device includes a two-dimensional semiconductor layer formed by a two-dimensional semiconductor material having a first formation energy, a two-dimensional metal conductor layer formed by a two-dimensional metal material and covering a surface of the two-dimensional semiconductor layer, and a metal layer covering a surface of the two-dimensional metal conductor layer. The two-dimensional metal material has a second formation energy smaller than the first formation energy. The two-dimensional metal conductor layer is formed by bonding of cations from the metal layer and anions from the two-dimensional semiconductor layer. As such, the contact resistances between the two-dimensional materials and the metals can be effectively reduced, enabling the application of the two-dimensional materials in semiconductor devices such as field-effect transistors.
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