PLASMA-FACING COMPONENT COOLING
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United States of America Patent
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Issued Date -
Apr 18, 2024
app pub date -
Dec 20, 2021
filing date -
Dec 21, 2020
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Abstract
A plasma-facing component for a plasma chamber, comprising: a plasma-facing target surface; an inlet through which to receive a coolant fluid and an outlet through which to expel the coolant fluid; and a plurality of internal cooling channels. Each cooling channel is connected to the inlet by a plurality of feed channels and to the outlet by a plurality of return channels, the feed channels being configured to direct coolant fluid against a region of a wall of the cooling channel. Respective openings of the feed and return channels into the cooling channel are arranged in non-overlapping repeating units along a length of the cooling channel Each unit comprises openings of at least one feed channel and at least one return channel.
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