COMPOSITE GATE DIELECTRIC FOR HIGH-VOLTAGE DEVICE

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United States of America Patent

APP PUB NO 20240113187A1
SERIAL NO

18150266

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ATTORNEY / AGENT: (SPONSORED)

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Abstract

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The present disclosure relates to an integrated chip. The integrated chip includes a substrate having one or more interior surfaces forming a recess within an upper surface of the substrate. Source/drain regions are disposed within the substrate on opposing sides of the recess. A first gate dielectric is arranged along the one or more interior surfaces forming the recess, and a second gate dielectric is arranged on the first gate dielectric and within the recess. A gate electrode is disposed on the second gate dielectric. The second gate dielectric includes one or more protrusions that extend outward from a recessed upper surface of the second gate dielectric and that are arranged along opposing sides of the second gate dielectric.

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Patent Owner(s)

Patent OwnerAddress
TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY LTDNO 8 LI-HSIN RD VI HSINCHU SCIENCE PARK HSINCHU 300

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Chen, Fei-Yun Hsinchu, TW 25 39
Chen, Ying-Chou Taichung City, TW 11 38
Chou, Chien-Chih New Taipei City, TW 90 310
Ciou, Yi-Kai Taoyuan City, TW 6 0
Jong, Yu-Chang Hsinchu City, TW 62 330
Lin, Chi-Te Hsinchu City, TW 9 19
Song, Jhu-Min Nantou City, TW 23 4

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