REFLECTIVE MASK BLANK AND REFLECTIVE MASK

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United States of America Patent

APP PUB NO 20240103354A1
SERIAL NO

18526463

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ATTORNEY / AGENT: (SPONSORED)

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Abstract

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A reflective mask blank, having a phase shift film having little dependence of phase difference and reflectance on film thickness, and a reflective mask.

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Patent Owner(s)

Patent OwnerAddress
HOYA CORPORATIONTOKYO

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
IKEBE, Yohei Tokyo, JP 39 215
KOZAKAI, Hirofumi Tokyo, JP 17 100
ONOUE, Takahiro Tokyo, JP 37 1659
SHOKI, Tsutomu Tokyo, JP 81 679

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