SELF-ALIGNED AIR GAP FORMATION IN MICROELECTRONICS PACKAGES
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United States of America Patent
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Mar 28, 2024
app pub date -
Sep 28, 2022
filing date -
Sep 28, 2022
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Abstract
Disclosed herein are microelectronics package architectures having self-aligned air gaps and methods of manufacturing the same. The microelectronics packages may include first and second substrates, first and second traces, and a photosensitive material. The first trace may be attached to the first substrate and comprise a first sidewall. The second trace may be attached to the first substrate and comprise a second sidewall. The second traced may be spaced a distance from the first trace with the second sidewall facing the first sidewall. First and second portions of the photosensitive material may be attached to the first and second sidewalls, respectively. The second substrate may be attached to the first and second traces. The first and second substrates and the first and second traces may form the air gap in between the first and second traces.
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