N-Type TOPCon Cell with Double-Sided Aluminum Paste Electrodes, and Preparation Method for Preparing N-Type TOPCon Cell with Double-Sided Aluminum Paste Electrodes
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United States of America Patent
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Issued Date -
Mar 21, 2024
app pub date -
May 25, 2021
filing date -
Mar 5, 2021
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Abstract
Some embodiments of the present disclosure provide an N-type TOPCon cell with double-sided aluminum paste electrodes, and a preparation method therefor. The front side of the cell is provided with a front-side silver main grid and a front-side aluminum fine grid, and the back side is provided with a back-side silver main grid and a back-side aluminum fine grid. The method for preparing the cell includes: texturing→B diffusion→BSG removal→alkali polishing→depositing a tunnel oxide layer and a polysilicon layer on a back side of a substrate by means of LPCVD→P diffusion on the back side→PSG removal→plating removal→deposition of an AlOx preparatory layer and a first SiNxHy preparatory layer on the front side→deposition of a second preparatory layer SiNxHy on the back side→UV laser ablation on the front side of the substrate and the back side of the substrate→screen printing.
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