SUBSTRATE TREATMENT APPARATUS AND TREATMENT SOLUTION SUPPLY METHOD
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United States of America Patent
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Issued Date -
Mar 21, 2024
app pub date -
Sep 12, 2023
filing date -
Sep 21, 2022
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Abstract
A substrate treatment apparatus includes: a plurality of solution treatment modules stacked at multiple stages, each configured to perform a treatment using a treatment solution on a substrate; and a solution supply unit configured to supply the treatment solution to the plurality of solution treatment modules, wherein: the solution supply unit includes supply pipelines provided with a solution feeder corresponding to the solution treatment modules; and the solution feeder includes a pump configured to pressure-feed the treatment solution to the corresponding solution treatment module and a filter configured to filtrate the treatment solution, and is arranged adjacent to the corresponding solution treatment module in a horizontal direction.
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