MEMS, METHOD OF MANUFACTURING AN MEMS AND METHOD OF CONFIGURING AN MEMS
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United States of America Patent
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Issued Date -
Mar 21, 2024
app pub date -
Sep 14, 2023
filing date -
Sep 15, 2022
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Abstract
An MEMS has a substrate and a cavity arranged in the substrate. A movable element is arranged in the cavity, configured to interact with a fluid arranged in the cavity, wherein a movement of the fluid and a movement of the movable element are causally related. A first opening which connects the cavity to an environment of the substrate causes a first phase offset of a first periodic oscillation which is causally related to the movement of the movable element when passing through the first opening. A second opening which connects the cavity to the environment of the substrate causes a second phase offset, different from the first phase offset, of a second periodic oscillation which is causally related to the movement of the movable element when passing through the second opening.
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