METHODS OF MANUFACTURING ACOUSTIC WAVE DEVICE WITH ANTI-REFLECTION LAYER

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United States of America Patent

APP PUB NO 20240088865A1
SERIAL NO

18511405

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Abstract

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An acoustic wave device is disclosed. The acoustic wave device includes a piezoelectric layer, an interdigital transducer electrode positioned over the piezoelectric layer, and an anti-refection layer over a conductive layer of the interdigital transducer electrode. The conductive layer can include aluminum, for example. The anti-reflection layer can include silicon. The anti-reflection layer can be free from a material of the interdigital transducer electrode. The acoustic wave device can further include a temperature compensation layer positioned over the anti-reflection layer in certain embodiments.

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SKYWORKS SOLUTIONS INCMASSACHUSETTS MASSACHUSETTS

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Fujii, Tatsuya Nagaokakyo-Shi, JP 125 1023
Kabe, Yoshiro Kobe-Shi, JP 40 422
Matsuda, Satoru Toyonaka-Shi, JP 82 1425
Nagano, Kenji Ibaraki-Shi, JP 10 56

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