Vibration-Driven Energy Harvesting Element and Method for Manufacturing the Same
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United States of America Patent
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Issued Date -
Mar 14, 2024
app pub date -
Nov 1, 2021
filing date -
Dec 17, 2020
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Abstract
A vibration-driven energy harvesting element includes fixed electrodes that are fixed to a base part, a movable electrode that is movable with respect to the fixed electrodes, and an elastic support part that includes one end fixed to the base part and another end fixed to the movable electrode and elastically supports the movable electrode. The elastic support part of the vibration-driven energy harvesting element includes-: a plurality of elastic structures each of which has a linking portion, a first elastic portion, and a second elastic portion. The first elastic portion having one end fixed to the linking portion and another end fixed to the movable electrode and extending in a second direction orthogonal to a first direction in which the movable electrode vibrates. The second elastic portion having one end fixed to the linking portion and another end fixed to the base part and extending in the second direction. The plurality of elastic structures being disposed on both sides of the movable electrode in the first direction; and connecting members that connect the linking portions included in the plurality of elastic structures to each other.
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