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• 15 United States
• 10 France
• 8 Japan
• 7 China
• 5 Korea
• 2 Other

Patent Owner(s)

Patent Owner	Address
CARL ZEISS SMT GMBH	RUDOLF-EBER-STRASSE 2 73447 OBERKOCHEN 73447

International Classification(s)

• G02B:OPTICAL ELEMENTS, SYSTEMS, OR APPARATUS
• G03F:PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNE....

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Inventor(s)

Inventor Name	Address	# of filed Patents	Total Citations
Bader, Dieter	Oberkochen, DE	16	83
Baueregger, Stefan	Oberkochen, DE	5	0
Beljakov, Andreas	Oberkochen, DE	1	0
Duerr, Dietmar	Oberkochen, DE	3	2
Keller, Bastian	Oberkochen, DE	3	0
Manger, Matthias	Oberkochen, DE	42	92
Ostendorf, Alexander	Oberkochen, DE	3	0
Pollak, Thilo	Oberkochen, DE	7	2
Raab, Markus	Oberkochen, DE	25	272
Schrezenmeier, Irina	Oberkochen, DE	2	0
Tschischgale, Joerg	Oberkochen, DE	7	43

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Maintenance Fees

Fee	Large entity fee	small entity fee	micro entity fee	due date
3.5 Year Payment	$1600.00	$800.00	$400.00	Sep 14, 2027
7.5 Year Payment	$3600.00	$1800.00	$900.00	Sep 14, 2031
11.5 Year Payment	$7400.00	$3700.00	$1850.00	Sep 14, 2035

Fee	Large entity fee	small entity fee	micro entity fee
Surcharge - 3.5 year - Late payment within 6 months	$160.00	$80.00	$40.00
Surcharge - 7.5 year - Late payment within 6 months	$160.00	$80.00	$40.00
Surcharge - 11.5 year - Late payment within 6 months	$160.00	$80.00	$40.00
Surcharge after expiration - Late payment is unavoidable	$700.00	$350.00	$175.00
Surcharge after expiration - Late payment is unintentional	$1,640.00	$820.00	$410.00

Full Text

US Patent Application No: 2024/0085,800

PROJECTION EXPOSURE APPARATUS AND METHOD FOR DESIGNING A COMPONENT OF A PROJECTION EXPOSURE APPARATUS

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