ACQUIRING APPARATUS, ACQUIRING METHOD, AND OPTICAL SYSTEM MANUFACTURING METHOD
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United States of America Patent
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Issued Date -
Mar 14, 2024
app pub date -
Sep 6, 2023
filing date -
Sep 13, 2022
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Abstract
An acquiring apparatus includes a first light source, a measurement optical system, an image sensor, an adjusting unit, an interferometer, and a calculating unit configured to calculate a distance between adjacent target surfaces among the plurality of target surfaces based on an interference signal. The index surface, a surface containing the first point, a surface containing the second point, and the light receiving surface have a conjugate relationship with each other with respect to the measurement optical system.
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