DISPLACEMENT CONTROL DEVICE FOR SEISMIC EVENTS
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United States of America Patent
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Issued Date -
Mar 14, 2024
app pub date -
Nov 16, 2023
filing date -
Feb 23, 2022
priority date (Note) -
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status (Latency Note)
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Abstract
A support platform is configured to support at least a portion of the weight of an associated semiconductor manufacturing tool, such as a furnace, when the associated semiconductor manufacturing tool is disposed on the support platform. The support platform comprises a base, a support plate disposed on the base and configured to move respective to the base, a brake plate arranged in fixed position respective to the base, and a damper secured to one of the support plate or the brake plate and frictionally engaging a track of the other of the support plate or the brake plate. The track includes a central track portion and inclined track portions extending away from the central track portion on respective first and opposite second sides of the central track portion. The inclined track portions are each inclined with respect to the central track portion.
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