BAW RESONATOR AND BAW RESONATOR MANUFACTURING METHOD

Number of patents in Portfolio can not be more than 2000

United States of America Patent

APP PUB NO 20240080011A1
SERIAL NO

18112609

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ATTORNEY / AGENT: (SPONSORED)

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Abstract

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A bulk-acoustic wave (BAW) resonator includes a central portion in which a first electrode, a piezoelectric layer, and a second electrode are sequentially stacked on a substrate, and an extension portion extending externally from the central portion, and an insertion layer and a loss prevention film are disposed in the extension portion between the substrate and the second electrode. The loss prevention film is formed to have a thickness of 50 Å to 500 Å. The insertion layer is stacked on the loss prevention film, and has a side surface opposing the central portion, the side surface is formed as a first inclined surface having a first inclination angle. The loss prevention film has a side surface opposing the central portion, the side surface is formed as a second inclined surface having a second inclination angle. The second inclination angle is formed to be greater than the first inclination angle.

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Patent Owner(s)

Patent OwnerAddress
SAMSUNG ELECTRO-MECHANICS CO LTDMAEYOUNG-RO 150 (MAETAN-DONG) YOUNGTONG-GU SUWON-SI GYEONGGI-DO

International Classification(s)

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  • 2023 Application Filing Year
  • H03H Class
  • 901 Applications Filed
  • 148 Patents Issued To-Date
  • 16.43 % Issued To-Date
Click to zoom InYear of Issuance% of Matters IssuedCumulative IssuancesYearly Issuances2023202420250255075100

Inventor(s)

Inventor Name Address # of filed Patents Total Citations
GIL, Jae Hyoung Suwon-si, KR 34 81
KIM, Kwang Su Suwon-si, KR 54 470
KIM, Yong Suk Suwon-si, KR 154 780
LEE, Moon Chul Suwon-si, KR 93 540
LEE, Sung Jun Suwon-si, KR 109 691
LEE, Tae Kyung Suwon-si, KR 138 315
PARK, Dong Hyun Suwon-si, KR 232 2038

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Citation count rangeNumber of patents cited in rangeNumber of patents cited in various citation count ranges8934501 - 10050100150200250300350400450500550600650700750800850900950

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