ROBOT ARM TRAJECTORY CONTROL

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United States of America Patent

APP PUB NO 20240075617A1
SERIAL NO

17903916

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ATTORNEY / AGENT: (SPONSORED)

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Abstract

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A method includes identifying a sequence of robot configurations associated with processing a plurality of substrates. The method further includes generating motion planning data comprising corresponding velocity data and corresponding acceleration data for each portion of a trajectory associated with the processing of the plurality of substrates. The method further includes causing a robot arm to be actuated based on the motion planning data.

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Patent Owner(s)

Patent OwnerAddress
APPLIED MATERIALS INC3050 BOWERS AVENUE SANTA CLARA CA 95054

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Farber, Matvey Redwood City, US 9 6
Thanu, Rajkumar Santa Clara, US 21 40
Wu, Pei-Chen Cupertino, US 4 0

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