PROBE ASSESSMENT METHOD AND SPM
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United States of America Patent
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Issued Date -
Feb 29, 2024
app pub date -
Jun 9, 2021
filing date -
Dec 21, 2020
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Abstract
A method of assessing a probe by measuring a known sample whose shape is known with the probe in an electronic microscope, the known sample having a projection part on a surface thereof, and the projection part having a shape tapered toward a vertex thereof, the method comprising a step of measuring circle equivalent radius of the projection part, a step of comparing the circle equivalent radius with a first threshold value, and a step of determining that the probe is satisfactory when the width is less than the first threshold value, and a step of determining that the probe is unsatisfactory when the width is equal to or greater than the first threshold value.
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