CONSTANT HEADSPACE AMPOULE

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United States of America Patent

APP PUB NO 20240068619A1
SERIAL NO

17898608

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Abstract

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Ampoules comprising a housing, a lid and a floating structure are described. The floating structure includes a float with a volume determined to displace a predetermined volume of liquid within the ampoule. An outlet channel extends from the top surface of the float. A baffle is positioned along the length of the outlet channel and creates a saturation zone between the baffle and the float.

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Patent Owner(s)

Patent OwnerAddress
APPLIED MATERIALS INC3050 BOWERS AVENUE SANTA CLARA CA 95054

International Classification(s)

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Marquardt, David Scottsdale, US 33 2386

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