HOLLOW CATHODE SYSTEM FOR GENERATING A PLASMA AND METHOD FOR OPERATING SUCH A HOLLOW CATHODE SYSTEM
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United States of America Patent
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Issued Date -
Feb 22, 2024
app pub date -
Oct 27, 2023
filing date -
Apr 29, 2021
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Abstract
A hollow cathode system generates a plasma. The system includes an anode device, a power supply for applying an electric current between a cathode tube and the anode device, and at least one gas reservoir for supplying the gas flowing through the cathode tube are used, in which at least two cathode tubes are used that are electrically connected to one another, and in which each cathode tube has a separate actuator with which the amount of gas flowing through the respective cathode tube is set.
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