SYSTEM FOR TREATMENT OF SUBSTRATES
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United States of America Patent
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Issued Date -
Feb 15, 2024
app pub date -
Dec 18, 2021
filing date -
Dec 18, 2020
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Abstract
A system for treating an article. The system comprises a segment adapted to contain a local atmosphere and an internal pressure which is within the range of 90 kPa to 110 kPa. The segment comprising a module. The module comprising a pair of electrodes and a manifold for delivering a fluid to the pair of electrodes, wherein the electrodes are adapted to energise the fluid delivered from the manifold before being deposited onto the article.
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