Non-Lid-Bonded MEMS Resonator With Phosphorus Dopant
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United States of America Patent
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Feb 15, 2024
app pub date -
Aug 14, 2023
filing date -
Mar 29, 2012
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Abstract
A microelectromechanical system (MEMS) resonator includes a substrate having a substantially planar surface and a resonant member having sidewalls disposed in a nominally perpendicular orientation with respect to the planar surface. Impurity dopant is introduced via the sidewalls of the resonant member such that a non-uniform dopant concentration profile is established along axis extending between the sidewalls parallel to the substrate surface and exhibits a relative minimum concentration in a middle region of the axis.
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