Reflective mask blank, reflective mask, method of manufacturing reflective mask blank, and method of manufacturing reflective mask

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United States of America Patent

PATENT NO 12001133
APP PUB NO 20240045320A1
SERIAL NO

18382356

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ATTORNEY / AGENT: (SPONSORED)

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Abstract

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A reflective mask blank includes a substrate; a multilayer reflective film that reflects EUV light; a protection film that protects the multilayer reflective film; and an absorption film that absorbs the EUV light, in this order. The protection film contains 50 at % or more of Rh. When a band-shaped gray scale image parallel to an interface between the protection film and the multilayer reflective film is obtained by imaging a cross section of the protection film with a transmission electron microscope (TEM) and a luminance profile of the gray scale image in a longitudinal direction of the gray scale image is created, a number of peaks of the luminance profile per 100 nm in the longitudinal direction of the gray scale image is 50 or more.

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Patent Owner(s)

Patent OwnerAddress
AGC INCTOKYO

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Akagi, Daijiro Tokyo, JP 24 20
Kato, Takuma Tokyo, JP 26 31
Oishi, Ryusuke Fukushima, JP 5 0
Okato, Takeshi Tokyo, JP 6 3
Ono, Yusuke Fukushima, JP 59 169

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