HYBRID STRUCTURE FOR A SURFACE ACOUSTIC WAVE DEVICE
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United States of America Patent
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Issued Date -
Feb 1, 2024
app pub date -
Oct 12, 2023
filing date -
Jun 2, 2016
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Abstract
A hybrid structure for a surface acoustic wave device comprises a useful layer of piezoelectric material having a first free surface and a second surface disposed on a support substrate that has a lower coefficient of thermal expansion than that of the useful layer, wherein the useful layer comprises an area of nanocavities.
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