REDUCING ENERGY CONSUMPTION OF A GAS DISCHARGE CHAMBER BLOWER

Number of patents in Portfolio can not be more than 2000

United States of America Patent

APP PUB NO 20240039228A1
SERIAL NO

18256290

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ATTORNEY / AGENT: (SPONSORED)

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Abstract

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In some general aspects, an apparatus for a light source includes: a monitoring module configured to monitor a fault status of one or more operating conditions of the light source; a decrement module configured to reduce an operating speed of a blower arranged in a gas discharge chamber of the light source if the fault status relating to one or more operating conditions of the light source is clear and if the decreased operating speed would be at or above a baseline speed; and an increment module configured to increase the operating speed of the blower if the fault status relating to one or more operating conditions of the light source is flagged. The blower is configured to displace a gas mixture including a gain medium from an energy source within the gas discharge chamber, the energy source configured to supply energy to the gas mixture.

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Patent Owner(s)

Patent OwnerAddress
CYMER LLC17075 THORNMINT COURT SAN DIEGO CA 92127

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Minakais, Matthew San Diego, US 4 0
Mohebbi, Mohammad Taghi San Diego, US 3 19
Williams, Spencer Ryan San Diego, US 3 0

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