POWER SUPPLY PANEL, POWER SUPPLY STRUCTURE AND FACILITY FOR TRANSPORTING SUBSTRATE
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United States of America Patent
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Issued Date -
Jan 18, 2024
app pub date -
Apr 3, 2023
filing date -
Jul 15, 2022
priority date (Note) -
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Abstract
A power supply panel according to the present disclosure is buried in a buried space having a groove structure or a hole structure, formed in a wall of a fabrication facility (FAB), such that a front portion is disposed on an exposed surface of the buried space, and includes a power supply body supplying power; and a heat dissipation portion formed in the front portion of the power supply body.
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