COMPOSITE SUBSTRATE

United States of America Patent

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Issued Date
Jan 18, 2024
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Sep 20, 2023
filing date
Jan 18, 2017

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Abstract

A composite substrate that is obtained by bonding a silicon (Si) wafer having an interstitial oxygen concentration of 2 to 10 ppma to a piezoelectric material substrate as a support substrate, and thinning the piezoelectric material substrate after the bonding.

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Patent Owner(s)

Patent Owner	Address
SHIN-ETSU CHEMICAL CO LTD	TOKYO TOKYO METROPOLIS

International Classification(s)

H03H:IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONA....

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Inventor(s)

Inventor Name	Address	# of filed Patents	Total Citations
AKIYAMA, Shoji	Gunma, JP	180	1705
SHIRAI, Shozo	Gunma, JP	18	69
TANNO, Masayuki	Gunma, JP	37	166

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Number of patents in Portfolio can not be more than 2000

United States of America Patent

18370612

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18370612

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