MICROSENSOR FOR MONITORING PHOSPHINE AND PREPARATION METHOD THEREOF
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United States of America Patent
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Issued Date -
Jan 18, 2024
app pub date -
Jul 5, 2023
filing date -
Jul 12, 2022
priority date (Note) -
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Abstract
A microsensor for monitoring phosphine and a preparation method thereof are provided, where the microsensor includes an interfering substance removal module, used to remove other impurity gases and keep a phosphine gas; a phosphine signal measuring module, used for measuring a concentration of the phosphine gas; a guard electrode, used to consume excess phosphine gas in the microsensor; and a power supply module, used for supplying power to the phosphine signal measuring module and the guard electrode; the power supply module is respectively connected with the phosphine signal measuring module and the guard electrode; and the interfering substance removal module is located at a front end of the guard electrode.
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